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Sensor Fusion for Nanopositioning formatIsbn:Softcover - 9783656865254 die vorbestehende Werke in ihreMaster's Thesis from the year 2014 in the subject Electrotechnology, grade: 2, Vienna University of Technology (Institute for Automation & Control), course: Master in Automation Electrical Enginnering, language: English, abstract: Sensors can be used to measure the position of an object. In the present thesis the effects which limit the usage of sensors in high dynamic positioning applications on a nanometer level are discussed. Various sensor